Preparation of Alumina Films by Ion Plating using Pulse Bias DC Source.
نویسندگان
چکیده
منابع مشابه
Tetrahedral amorphous carbon films prepared by magnetron sputtering and dc ion plating
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ژورنال
عنوان ژورنال: SHINKU
سال: 1998
ISSN: 0559-8516,1880-9413
DOI: 10.3131/jvsj.41.159